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High purity graphite/carbon fiber products
Classification:
Semiconductor Application
Summary:
High-purity graphite and carbon fiber products are treated by AGM's special purification process, which has high purity and is suitable for semiconductor crystal growth.
- Product Description
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- Commodity name: High purity graphite/carbon fiber products
High-purity graphite and carbon fiber products are treated by AGM's special purification process, which has high purity and is suitable for semiconductor crystal growth.
Introduction
High-purity graphite and carbon fiber products are treated by AGM's special purification process, which has high purity and is suitable for semiconductor crystal growth.
Advantages
● High purity
● Stable performance
Applications
● Hot zone parts of SiC single-crystal growth
● Hot zone parts of SiC epitaxial growth
● MOCVD parts
● High-temperature components
Performance
● Graphite products, graphite powder: ash content <= 5ppm
● Insulation felt, CFC parts: ash content <= 20ppm
● Special treatment can be applied to certain elements that are not conducive to crystal growth
Key words:
High purity graphite/carbon fiber products
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