威海浩威户外用品有限公司
搜索历史清除全部记录
- All
- Product Management
- News
- Introduction
- Enterprise outlets
- FAQ
- Enterprise Video
- Enterprise Atlas
Product
Contact
Tel:
Mobel:
Fax:
Email:
TaC Coating
Classification:
Semiconductor Application
Summary:
TaC Coating is made by vapor deposition on the surface of a high-purity graphite substrate using AGM's proprietary chemical vapor deposition (CVD) process.
- Product Description
-
- Commodity name: TaC Coating
TaC Coating is made by vapor deposition on the surface of a high-purity graphite substrate using AGM's proprietary chemical vapor deposition (CVD) process.
Introduction
TaC Coating is made by vapor deposition on the surface of a high-purity graphite substrate using AGM's proprietary chemical vapor deposition (CVD) process.
Advantages
● Excellent heat resistance
● Prevents the separation of graphite substrate particles, the release of gases and impurities
● Excellent corrosion resistance
Applications
● Hot zone parts of SiC single-crystal growth
● Hot zone parts of SiC epitaxial growth
● MOCVD parts
● High-temperature components
Performance
Item
Unit
Data
Thickness
μm
30~50
Density
Mg/m3
14.5
Melting Point
℃
3985
Hardness
HK
1550
Resistivity
μΩ・m
0.15
Thermal conductivity
W/m・K
9-22
Coefficient of thermal expansion
10-6/K
7.1
*Due to the current limited methods of fully inspecting coatings, some of the above data are derived from the following literature and are not guaranteed values
Key words:
TaC Coating
Previous
More products
AGM/ Advanced Graphite Materials
with more than 20 years of industry experience and professional team, focuses on carbon and graphite products, and is committed to creating high-quality, high-performance carbon and graphite products for customers.
We maintain our passion and focus on carbon and graphite products, and through continuous efforts and innovation, we provide customized solutions for customers in semiconductor/ new energy/ photovoltaic/ thermal process/ biomaterials industries to meet the needs of different fields.
We look forward to working with you to create a better future together!
Huangjiashan Industrial Park, Longquan Town, Jimo District, Qingdao-266206, China
WeChat QR Code