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Product Information
More than 20 years of carbon manufacturing experience to meet customer needs in different scenarios
PRODUCTS CENTER
Saint-Lucia TaC Coating
Category:
Saint-LuciaSemiconductor Application
Product Description
Introduction
TaC Coating is made by vapor deposition on the surface of a high-purity graphite substrate using AGM's proprietary chemical vapor deposition (CVD) process.
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Advantages
● Excellent heat resistance
● Prevents the separation of graphite substrate particles, the release of gases and impurities
● Excellent corrosion resistance
Applications
● Hot zone parts of SiC single-crystal growth
● Hot zone parts of SiC epitaxial growth
● MOCVD parts
● High-temperature components
Performance
|
Item |
Unit |
Data |
|
Thickness |
μm |
30~50 |
|
Density |
Mg/m3 |
14.5 |
|
Melting Point |
℃ |
3985 |
|
Hardness |
HK |
1550 |
|
Resistivity |
μΩ・m |
0.15 |
|
Thermal conductivity |
W/m・K |
9-22 |
|
Coefficient of thermal expansion |
10-6/K |
7.1 |
*Due to the current limited methods of fully inspecting coatings, some of the above data are derived from the following literature and are not guaranteed values
AGM/ Advanced Graphite Materials
with more than 20 years of industry experience and professional team, focuses on carbon and graphite products, and is committed to creating high-quality, high-performance carbon and graphite products for customers.
We maintain our passion and focus on carbon and graphite products, and through continuous efforts and innovation, we provide customized solutions for customers in semiconductor/ new energy/ photovoltaic/ thermal process/ biomaterials industries to meet the needs of different fields.
We look forward to working with you to create a better future together!
Huangjiashan Industrial Park, Longquan Town, Jimo District, Qingdao-266206, China
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